TMFC50V

Manufacturer

First General Technology Inc.

 

Code： TMFC50V Name： TMFC50V mass flow controller • High accuracy, low flow
• Fast response (≦ 1.0)
• Wide pressure range (1300 psig) the following
• No leakage
• do not have the temperature or pressure
• Connect a compatible
• High stability of mobile sensor
• Corrosion resistance value
• Excellent linearity
• Excellent long-term stability
• Modular design
• Compact Flow Control Systems
Flow meter

 

 TMFC50V mass flow controller
TMFM50V mass flow meter 

 

• High accuracy, low flow
• Fast response (≦1.0)
• Wide pressure range (1300 psig) the following
• No leakage
• do not have the temperature or pressure
• Connect a compatible
• High stability of mobile sensor
• Corrosion resistance value
• Excellent linearity
• Excellent long-term stability
• Modular design
• Compact Flow Control Systems

 

 

Model

TMFC30V

TMFC30A

TMFC50V

TMFC50A

FlowRange(N2)

10sccm~30SLM

10sccm~30SLM

10scc~50SLM

10scc~50SLM

Response Time

≦1.0 sec

Accuracy

±1.0 % FS

Repeatability

±0.25 % FS

Proof Pressure

1300 PSIG

Leak rate

1 x 10-9 atm.cc/sec or less

Workingtemperature Range

0~50℃

Materials of parts in contact w/gases

Body:SUS316

Valve seat:Vition™(Option Bura™or Kalrez™or Teflon™)

Joint

Standard:1/4 compression

Option: 1/8 compression,1/4 VCR™,3/8 Compression,VCR™

Electrical connections

Dsub 15-pin male connector per standards

Flow rate input signals

0~5 Vdc

4~20mA

0~5 Vdc

4~20mA

Flow rate output signals

0~5 Vdc

4~20mA

0~5 Vdc

4~20mA

required power supply

＋15~28 Vdc/350mA